CASE

FSW-160 project for R & D center of a famous British semiconductor local scrubber supplier in Shangh


This FSW-160 scrubber system is designed and installed for R & D center of a famous British semiconductor local scrubber supplier in Shanghai. The installation has completed in 2020. The function of d & r center is aiming to test the processing efficiency of products under development. It requested some harsh gas treatment conditions to the treatment capacity of our wet scrubber system. The gas emission has to be meet the trade standard of semiconductor. Therefore we’ve added kinds of detectors ,sensors and chemical solution supply unit to ensure the system can be treat the gas properly under automatic mode. It provides a good guarantee for the stability of the experiment.


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